JPH0446364Y2 - - Google Patents
Info
- Publication number
- JPH0446364Y2 JPH0446364Y2 JP9770884U JP9770884U JPH0446364Y2 JP H0446364 Y2 JPH0446364 Y2 JP H0446364Y2 JP 9770884 U JP9770884 U JP 9770884U JP 9770884 U JP9770884 U JP 9770884U JP H0446364 Y2 JPH0446364 Y2 JP H0446364Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- holder
- holders
- deflection
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000005686 electrostatic field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9770884U JPS6113455U (ja) | 1984-06-29 | 1984-06-29 | 電子線用偏向電極支持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9770884U JPS6113455U (ja) | 1984-06-29 | 1984-06-29 | 電子線用偏向電極支持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6113455U JPS6113455U (ja) | 1986-01-25 |
JPH0446364Y2 true JPH0446364Y2 (en]) | 1992-10-30 |
Family
ID=30657265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9770884U Granted JPS6113455U (ja) | 1984-06-29 | 1984-06-29 | 電子線用偏向電極支持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6113455U (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0486620U (en]) * | 1990-11-30 | 1992-07-28 |
-
1984
- 1984-06-29 JP JP9770884U patent/JPS6113455U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6113455U (ja) | 1986-01-25 |
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